![sputtering](../PICTURES/SPUTTERING2.jpg)
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Source |
wavelength: 13.56MHz |
Power: Up to 600W |
|
Target size |
Targets of 3" |
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Substrates |
Homogeneity over 10cm x 10 cm |
Rotary substrate holder |
Polarizable substrate |
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Working conditions |
Vacuum system: 10-7Torr |
Rotary pump |
Turbomolecular pump |
Temperatures between 20ºC and 800ºC |
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Materials |
Available gases: Ar, O2, N2 |
Conductive Tramsparent oxides : ZnO, ITO, SnO |
Metals: Ag, Al ... |
|
Belongs to: Solar Energy Group (GES)
Contact Person: Paz Carreras
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![](../PICTURES/small/AFM_2.JPG)
![glove box](../PICTURES/small/GLOVE_BOX.JPG)
![lithography](../PICTURES/small/MASK_ALIGNER.JPG)
![RIE](../PICTURES/small/RIE.JPG)
![sputtering](../PICTURES/small/SPUTTERING.JPG)
![furnace](../PICTURES/small/FURNACE.jpg)
![laminar flow cabin](../PICTURES/small/LAMINAR_FLOW_CABIN.JPG)
![PECVD](../PICTURES/small/PECVD.JPG)
![spinner](../PICTURES/small/SPINNER.JPG)
![milli-Q](../PICTURES/small/MILLI-Q1.jpg)
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