Title: Comparison of three titanium-precursors for atomic-layer-deposited TiO2 for passivating contacts on silicon

Authors: Hiller, D.; Munnik, F.; López-Vidrier, J.; Solonenko, D.; Reif, J.; Knaut, M.; Thim, O.; Grant, N.E.
Journal: Journal Of Vacuum Science & Technology A
Vol: 42
Number:
Start page: 032406
Last page:
DOI: doi
Institutional repositories:
Year: 2024
Key: Article