Title: Characterization of amorphous carbon films from 5 nm-200 nm on single-side polished a-plane sapphire substrates by spectroscopic ellipsometry

Authors: Z Li; C Cui; X Zhou; S Bian; O Arteaga; X Xu
Journal: Frontiers In Physics
Vol: 965
Number:
Start page:
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DOI: doi
Institutional repositories:
Year: 2022
Key: Article