Title: Performance comparison of a Bosch versus CORE process for etching silicon nanostructures
Speakers: Karatas, E.; Lopez-Aymerich, E.; Berthelsen, C.V.; Romano-Rodriguez, A.; Svendsen, W.E.
Congress: 48th international conference on Micro and Nano Engineering – Eurosensors
Country: BEL
City: Leuven
Organizing institutions:
Year: 2022