Title: Simulations and nanofabrication of photonic crystals based on silicon pillars for mechanical biosensors
Author: López-Aymerich, E.; Dimaki, M.; Svendsen, W.E.; Hernández, S.; Navarro-Urríos, D.; Moreno, M.; Serrras, F.; Romano-Rodriguez, A.
Publisher: IEEE
Vol:
Number:
Start page: 54
Last page:57
ISBN: 978-1-6654-4452-1
Year: 2021