Title: Double-sided and single-sided polished 6H-SiC wafers with subsurface damage layer studied by Mueller matrix ellipsometry

Authors: Li, Huihui; Cui, Changcai; Bian, Subiao; Lu, Jing; Xu, Xipeng; Arteaga, Oriol
Journal: Journal of Applied Physics
Vol: 128
Number: 23
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DOI: doi
Institutional repositories:
Year: 2020
Key: Article