Title: Simulations and nanofabrication of photonic crystals based on silicon pillars for mechanical biosensors
Speakers: López-Aymerich, E.; Dimaki, M.; Svendsen, W; Hernandez, S.; Navarro-Urrios, D.; Moreno, M.; Serras, F.; Romano-Rodríguez, A.
Congress: 13th Spanish Conference on Electronic Devices – CDE 2021
Country: ESP
City: Sevilla
Organizing institutions: CDE
Year: 2021