Title: Influence of Radiofrecuency Power on the properties of Cu3N films deposited by magnetron sputtering in a pure nitrogen atmosphere
Speakers: Rodríguez-Tapiador, M.I; Merino, J.; Jawhari, T.; Muñoz Rosas, A.L.; Bertomeu, J.; Fernández, S.
Congress: E-MRS 2022 Fall Meeting
Country: POL
City: Warsaw
Organizing institutions: European materials research society
Year: 2022