Title: High-Frequency Mechanical Excitation of a Silicon Nanostring with Piezoelectric Aluminum Nitride Layers

Authors: Pitanti, Alessandro; Makkonen, Tapani; Colombano, Martin F.; Zanotto, Simone; Vicarelli, Leonardo; Cecchini, Marco; Griol, Amadeu; Navarro-Urrios, Daniel; Sotomayor-Torres, Clivia; Martinez, Alejandro; Ahopelto, Jouni
Journal: Physical Review Applied
Vol: 14
Number: 1
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DOI: doi
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Year: 2020
Key: Article