Title: Room-Temperature Silicon Platform for GHz-Frequency Nanoelectro-Opto-Mechanical Systems

Authors: Navarro-Urrios Daniel; Colombano Martin F.; Arregui Guillermo; Madiot Guilhem; Pitanti Alessandro; Griol Amadeu; Makkonen Tapani; Ahopelto Jouni; Sotomayor-Torres Clivia M.; Martinez Alejandro
Journal: ACS Photonics
Vol: 9
Number: 2
Start page: 413
Last page: 419
DOI: doi
Institutional repositories:
Year: 2022
Key: Article